사업영역


CCSS (Centural Chemical Supply System)
    Applications
  • Chemical control of Stripper and FPD
    (TFT LCD, PDP, OLED)
  • Concentration management of Stripper for TFT LCD

    • Features
  • Solution Package
    Central Chemical Supply System
  • Chemical Supply System - Acid/Alkali / Solvent (Pump or N2 Pressure Supply)
  • ACQC (Auto Clean Quick Coupler) System for Tank Lorry System


SLURRY Mixing System
    Applications
  • Slurry Distribution System
    (Oxide, Metal, Ceria, etc)

    • Features
  • Solution Package
    Equipment Module (Unit/Tank)
    Piping, & Cabling (Signal)
    Valve Manifold Box(VMB)
    Central Monitoring System (CMS)
  • Supply by Pump System
  • Dry-Out Prevention by Atomizer
  • Accurate Blending
  • Automatic Flushing with DIW
  • asy Operation with Touch Panel Interface
  • Automatic control with PLC
  • Optimal design for safety and maintenance
  • Flow Control System
  • Other for Semiconductor & FPS Process


SLURRY Mixing System _ Drum Charge Unit
    Applications
  • Slurry Distribution System
    (Oxide, Metal, Ceria, etc)

    • Features
  • Solution Package
    Equipment Module (Unit/Tank)
    Piping, & Cabling (Signal)
    Valve Manifold Box(VMB)
    Central Monitoring System (CMS)
  • Supply by Pump System
  • Dry-Out Prevention by Atomizer
  • Accurate Blending
  • Automatic Flushing with DMW
  • Easy Operation with Touch Panel Interface
  • Automatic control with PLC
  • Optimal design for safety and maintenance
  • Flow Control System
  • Other for Semiconductor & FPS Process
솔리스(주)    |     대표 : 이종필    |     사업자번호 : 147-81-01030
주소 : 충남 천안시 서북구 직산읍 직산로 135-22
Tel : 041-565-2536    |     Fax : 070-8777-2536    |     E-mail : Solis@solisinc.co.kr
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